This category encompasses specialized equipment and facilities dedicated to semiconductor manufacturing. It includes semiconductor process-specific equipment such as wafer processing equipment (etching systems, CVD systems, sputtering systems), exposure equipment (steppers, scanners), inspection and measurement equipment (film thickness measurement systems, defect inspection systems), cleaning equipment, and ion implantation systems. These high-precision devices are designed for use in cleanroom environments and capable of nanometer-precision processing and inspection. Distinguished from general manufacturing equipment or electronic component manufacturing equipment, this classification covers only equipment specialized for front-end and back-end processes in semiconductor fabrication facilities.