This category encompasses scanning probe microscopy equipment such as Atomic Force Microscopes (AFM) and Scanning Tunneling Microscopes (STM). These instruments are used for nanometer-level surface topography measurement, roughness analysis, and material property evaluation, making them essential for semiconductor manufacturing, quality control of precision machined components, and research and development of thin film materials. Unlike optical or electron microscopes, these devices achieve atomic-level resolution through physical probe scanning, supporting surface analysis of ultra-precision manufactured products and new material development in manufacturing industries.