• 高輝度FE電子銃搭載のFE-SEMによる高解像度観察ソリューション

高輝度FE電子銃搭載のFE-SEMによる高解像度観察ソリューション

高輝度フィールドエミッション電子銃を搭載したFE-SEMは、従来の熱電子源を使用したSEMと比べて、より高い解像度での観察を実現します。微細構造の観察や低加速電圧下でもクリアな画像を提供し、多様なアプリケーションに対応します。
■ 概要
フィールドエミッション走査電子顕微鏡(FE-SEM)は、高輝度フィールドエミッション(FE)電子銃を採用し、従来の熱電子源を使用するSEMと比較して、より高精度な観察を可能にする装置です。FE-SEMは、低加速電圧でも高解像度の画像を提供し、サンプル表面の微細構造を詳細に観察することができます。さらに、電子源とレンズタイプの多様な組み合わせが可能で、サンプルや用途に応じた柔軟な対応が求められる現場で効果を発揮します。
■ 特長
- 高輝度FE電子銃の採用:熱電子源に比べてより高密度の電子ビームを発生し、細かい構造の観察を高解像度で実現します。
- 低加速電圧での高解像度:低い加速電圧でもクリアな画像を提供し、サンプル表面の繊細な観察が可能です。
- 多様なレンズ・電子源の組み合わせ:アプリケーションやサンプルに応じて、最適な観察条件を設定できます。
- サンプルに優しい観察:低電圧での観察が可能なため、感受性の高いサンプルの損傷を最小限に抑えます。
- 広範なアプリケーション対応:材料科学、生物学、半導体など、多様な分野にわたるサンプル観察に対応します。
■ 仕様
- 電子源:高輝度フィールドエミッション電子銃
- 解像度:1nm以下(高加速電圧時)
- 加速電圧:0.5kV~30kV
- 観察モード:低電圧観察モード、二次電子検出モード、反射電子検出モード
- アプリケーション:材料科学、バイオサイエンス、半導体解析、表面分析
■ 用途
- 材料科学:金属、セラミック、ポリマーなどの表面構造や欠陥の解析。
- バイオサイエンス:細胞、組織の微細構造観察、微生物の表面観察。
- 半導体解析:微細配線、デバイス構造の高解像度観察、プロセス評価。
- 表面分析:触媒やナノ材料の表面特性評価。
高輝度FE電子銃による高解像度観察で、幅広い分野にわたる精密なサンプル解析を実現します。
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COAX GROUP CORPORATION LTD.

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Electron microscope / analytical systems / scientific equipment

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Coax Group is a trusted analysis solution partner with 35 years of experience, offering comprehensive solutions including knowledge, instrumentation, installation, application, and service support. Th ...