半導体向けコーティングサービス

高感度の半導体産業向けに特化した薄膜ソリューションBALINIT DYLYN などのエリコンバルザースのカスタマイズされたダイヤモンド状コーティング (DLC) ソリューションは、傷つきやすい半導体ウェーハを汚染することなく、低摩擦、優れた接着力、高い熱伝導率などの有益な特性を備えたウェーハコンタクトツーリングおよび位置決めシステムを提供します。
DLC コーティングが個々の要件をよりよく満たすほど、総所有コストは低くなります。 当社の能力と応用に関する専門知識により、DLC コーティングの特性をお客様の特定の要求に合わせて正確に調整することができます。 高硬度、低い摩擦係数、優れた耐摩耗性は、粒子の形成を大幅に低減するのに役立ち、したがって高歩留まりの製造が可能になります。これは、特に小さいフィーチャーサイズに関して重要な要素です。 コーティングされた部品の再現可能な品質が保証されているため、一貫したプロセスの信頼性が得られます。
エリコンバルザースは、半導体業界の非常に厳しいニーズを満たす、カスタマイズされた半導体コーティングの提供を専門としています。 そのような多くのソリューションの中のほんの一例です。ウェーハ電子チャック、ペデスタル、エッチングキット、シャワーヘッド、真空ポンプコンポーネントなどの用途向けの、フッ素系化学薬品によるエッチングに耐性のあるまったく新しいコーティングです。

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Electronic parts / Semiconductor / Heat treatment and coating facilities

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Company Information

Oerlikon (Thailand) Co., Ltd.

Main 3 Products

Coating service / Onsite coating center

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Coating Services, Tools, Automotive, Main Office

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