TORR High Pressure Regulator for Semiconductor Use ｜ Precise High-Pressure Control

• The TORR High Pressure Series is designed for semiconductor and specialty gas applications requiring high-pressure operation

• Provides stable, safe, and repeatable pressure control, even under high-load conditions

• Available in multiple models, covering applications from sub-systems to main gas lines

• Supports general gases, process gases, and corrosive gases in selected models

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In semiconductor manufacturing processes, the use of gases under high pressure is a critical factor affecting flow rate, tool response, and overall process stability. If pressure is not properly controlled, both safety and production yield can be compromised. TORR High Pressure Regulators are developed to address these challenges directly, with a design philosophy focused on stable, precise, and reliable pressure control under real operating conditions.

Even when a system is capable of supplying high-pressure gas, small pressure fluctuations can disrupt process balance. TORR High Pressure Regulators maintain stable pressure from the gas source to the point of use, supporting line gas supply, process tools, and main gas distribution systems. The internal structure is engineered to withstand continuous high-pressure operation, offers multiple outlet pressure gauge ranges, and supports high flow rates without sacrificing stability.

Inlet pressure gauge: 25 MPa (Max. 15 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 250 NL/min (P2 = 0.5)

Weight: 1.3 kg

Inlet pressure gauge: 25 MPa (Max. 15 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 1,400 NL/min (P2 = 0.5)

Weight: 1.8 kg

Inlet pressure gauge: 25 MPa (Max. 15 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 90 Nm³/h (P2 = 0.5)

Weight: 4.9 kg

Inlet pressure gauge: 25 MPa (Max. 15 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 120 Nm³/h (P2 = 0.5)

Weight: 14 kg

Inlet pressure gauge: 25 MPa (Max. 15 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 1,400 NL/min (P2 = 0.5)

Weight: 6.7 kg

Inlet pressure gauge: 25 MPa (Max. 15 MPa) or 35 MPa (Max. 15 MPa)

Outlet pressure gauge: 5 / 10 / 20 MPa

Maximum working pressure: 3 / 6 / 12 MPa

Flow rate: 800 NL/min (P2 = 6.0)

Weight: 2 kg

O₂, N₂, Ar, H₂, He, CO₂, Ne, Xe, Kr, B₂H₆, SiH₄, PH₃, GeH₄, AsH₃, H₂Se, Si₂H₆, NF₃, BF₃, PF₃, SiF₄, CF₄, CHF₃, CH₂F₂, C₂F₆, C₃F₆, C₃F₈, C₄F₆, C₄F₈, C₅F₈, CO, NO, F₂, HF, HCl, HBr, N₂O, SF₆, NH₃, Cl₂, BCl₃, ClF₃, SiH₂Cl₂, SiCl₄, WF₆, etc.

Selecting the appropriate TORR High Pressure model ensures safe and stable high-pressure gas supply while meeting the strict requirements of semiconductor processes. Proper selection helps reduce operational risk and enhances long-term system reliability.

TORR High Pressure Regulators are solutions for semiconductor applications that require more than simply “delivering pressure.” They are engineered to control pressure precisely, ensuring stability, safety, and industrial-grade reliability.

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Q: How does TORR High Pressure differ from TORR Low Pressure?

A: The High-Pressure Series supports higher inlet pressure ranges and operating pressures, making it suitable for main gas lines and high-pressure processes.

Q: Which models are suitable for large-scale systems?

A: TORR-3300 and TORR-2500 are suitable for systems requiring high flow rates and continuous operation.

Q: Which TORR model supports corrosive gases?

A: TORR-2800 is specifically designed for corrosive process gases.

• High Pressure Regulator: A device used to control gas pressure in high-pressure applications

• Semiconductor Process Gas: Gases used in semiconductor manufacturing processes

• Main Gas Line: The primary gas distribution piping system in a factory