TANAKA S-TORR Ultra-high purity gas pressure regulator Semiconductor Special gas Thailand

S-TORRThis model pursues gas purity maintenance performance and safety to the utmost limit for high-purity gas piping systems.
For strongly corrosive gas, negative pressure control, tied diaphragm type
We have models for special applications such as
S-TORRV 1300 series
Model for standard flow rate for primary high pressure Inlet maximum working pressure 15.0MPa
Outlet side maximum working pressure -0.1 to 1.5 MPa with gauge　1.0 MPa
-0.1 to 1.0 MPa with gauge 0.6 MPa
-0.1 to 0.6 MPa with gauge 0.4 MPa
-0.1 to 0.3 MPa with gauge 0.2 MPa
Regular flow rate (flow rate in nitrogen gas conversion) 40 to 80 L/min (nor)
Drawings, CAD data, instruction manual *You can check it from the link below.