TORR Low Pressure Regulator for Semiconductor Use ｜ Precise Low-Pressure Control for Specialty Gas Processes

• The TORR Series is a low-pressure regulator specifically designed for semiconductor applications and specialty gases

• Provides stable, repeatable, and precise low-pressure control to minimize process fluctuation

• Available in multiple models, covering applications from experimental setups and sub-systems to main gas lines in fabs

• Supports a wide range of process gases used in the semiconductor industry and R&D applications

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In semiconductor manufacturing, gas control is not only about cleanliness—it is about precision at extremely low pressure levels. Even slight pressure fluctuations can directly affect thin films, coating quality, and overall process yield. TORR Low Pressure Regulators are developed to meet applications where “pressure must truly remain stable,” starting from the gas supply source.

Although many production lines use high-quality gas sources, pressure instability can still occur. The TORR Series is designed to maintain stable pressure, respond to load changes, and ensure that every process step operates exactly as intended. Its design philosophy focuses on highly accurate low outlet pressure control, continuous flow capability, and compatibility with gases used in semiconductor processes as well as research and development.

Inlet pressure gauge: Nil (Max. 5 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 0.99 MPa

Flow rate: 300 NL/min (P2 = 0.4)

Weight: 1.1 kg

Inlet pressure gauge: Nil (Max. 3.5 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 0.99 MPa

Flow rate: 800 NL/min (P2 = 0.4)

Weight: 1.6 kg

Inlet pressure gauge: Nil (Max. 2 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 1,400 NL/min (P2 = 1.0)

Weight: 3 kg

Inlet pressure gauge: Nil (Max. 2 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 1,400 NL/min (P2 = 1.0)

Weight: 3.7 kg

Inlet pressure gauge: Nil (Max. 1.5 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 2,200 NL/min (P2 = 1.0)

Weight: 10 kg

Inlet pressure gauge: Nil (Max. 1 MPa)

Outlet pressure gauge: 0.3 / 0.6 / 1.0 / 1.5 MPa

Maximum working pressure: 0.2 / 0.4 / 0.6 / 1.0 MPa

Flow rate: 3,000 NL/min (P2 = 1.0)

Weight: 32 kg

O₂, N₂, Ar, H₂, He, CO₂, Ne, Xe, Kr, B₂H₆, SiH₄, PH₃, GeH₄, AsH₃, H₂Se, Si₂H₆, NF₃, BF₃, PF₃, SiF₄, CF₄, CHF₃, CH₂F₂, C₂F₆, C₃F₆, C₃F₈, C₄F₆, C₄F₈, C₅F₈, CO, NO, F₂, HF, HCl, HBr, N₂O, SF₆, NH₃, Cl₂, BCl₃, ClF₃, SiH₂Cl₂, SiCl₄, WF₆, etc.

Selecting the appropriate TORR model based on pressure range and flow rate helps reduce pressure fluctuation, improve process stability, and systematically support yield enhancement in semiconductor manufacturing.

TORR Low Pressure Regulators are the core of low-pressure gas control in the semiconductor industry. Designed with stability, precision, and long-term reliability in mind, the TORR Series effectively supports experimental setups, sub-systems, and large-scale production lines.

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Q: How is TORR different from general regulators?

A: TORR is specifically designed for low-pressure applications, offering higher stability and precision than general-purpose regulators.

Q: What applications are suitable for the TORR Series?

A: Semiconductor processes, specialty gas systems, and R&D applications requiring stable low-pressure control.

Q: Which TORR model should be selected for semiconductor production lines?

A: Selection depends on system size and required flow rate—from TORR-30 for small instruments to TORR-800 for main gas supply systems.

• Low Pressure Regulator: A device designed to control gas pressure in low-pressure ranges

• Specialty Gases: Gases used specifically in industrial or semiconductor processes

• Yield: The output or success rate of a manufacturing process