High-Precision Constant Dispensing Pump Series_Catalog

Reliable, particle-free chemical dispensing.

KOGANEI's High-Precision Constant Dispensing Pump Series provides advanced solutions for precise liquid chemical handling in demanding industrial applications such as semiconductor manufacturing, FPDs, and battery production. A core feature across the series is the liquid contact area, composed of fluorine resin, ensuring excellent chemical resistance, coupled with a unique design devoid of sliding parts to virtually eliminate particle generation. This structure also guarantees high repeatability of dispensing volume with minimal daily maintenance. The series includes several pump types. Bellows Pumps (pneumatic and electric) offer simple volume setting or digital control. The Electric CT Pump, featuring a novel Coaxial Tubephragm structure, excels in low particle generation due to smooth PFA tubes and a small wet surface area, provides excellent solution replacement, and superior bubble removal, making it ideal for high-viscosity liquids. PT Pumps (electric and air-operated) utilize an 8-shaped tubephragm, preventing chemical gelling and crystallization by minimizing residue and air ingress. HT and RT Pumps, with their Rigid Tubephragm structure, deliver high response and flow rate stability, suitable for microscopic dispensing and improving slit coating startup. For FPD processes, AC servo motor-driven CT/PT/HT pumps offer enhanced constant flow rate performance with minimal pulsation and precise speed control, allowing synchronization with substrate movement. These pumps are applicable for photoresist coating, electrolyte filling, wafer and disk coating, and general chemical dispensing, available as standalone units or integrated Dispensing Units with controllers for flexible system configuration.